Picture of UV Laser
Current status:
AVAILABLE
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Group:
CMNF - Lithographie
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High Resolution Direct Lithography System for fast Prototyping and Maskless Fabrication
• Laser source 375 nm, 73 mW
• Wafer writing area 100 x 100 mm
• Laser spot size: 1μm and 10 μm
• Stage travel resolution and repeatability: 100 nm

Tool name:
UV Laser
Manufacturer:
KLOE
Model:
DILASE 650

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Licensed Users

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