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Evaporation MEB 550SL (libre-service-2018) (Ti, Ni, Au, Al, Ge, Cr, Pd, Pt) (CMNF(dep)CT_15_f_BCM)
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AVAILABLE
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CMNF - Dépôts physiques
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Description
Equipement sur badgeuse BCM depuis le 7 avril 2021
Ti, Ni, Au, Ge, Al, Pd, Pt, Cr
500nm max
Details
Tool name:
Evaporation MEB 550SL (libre-service-2018) (Ti, Ni, Au, Al, Ge, Cr, Pd, Pt)
Manufacturer:
Plassys
Model:
MEB 500SL
Typical process information
Equipement sur badgeuse BCM depuis le 7 avril 2021
Ti, Ni, Au, Ge, Al, Pd, Pt, Cr
500nm max
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