Picture of Evaporation MEB 550SL (libre-service-2018) (Ti, Ni, Au, Al, Ge, Cr, Pd, Pt)
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CMNF - Dépôts physiques
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Description

Equipement sur badgeuse BCM depuis le 7 avril 2021

Ti, Ni, Au, Ge, Al, Pd, Pt, Cr

500nm max

Details
Tool name:
Evaporation MEB 550SL (libre-service-2018) (Ti, Ni, Au, Al, Ge, Cr, Pd, Pt)
Manufacturer:
Plassys
Model:
MEB 500SL
Typical process information

Equipement sur badgeuse BCM depuis le 7 avril 2021

Ti, Ni, Au, Ge, Al, Pd, Pt, Cr

500nm max

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