Picture of Evaporation MEB 550SL (2018) (Ti, Ni, Au, Al, Ge, Cr, Pd, Pt)
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
Group:
CMNF - Dépôts physiques
Files
You must be logged in to view files.
Description

Equipement sur badgeuse BCM depuis le 7 avril 2021

Ti, Ni, Au, Ge, Al, Pd, Pt, Cr

500nm max

Details
Tool name:
Evaporation MEB 550SL (2018) (Ti, Ni, Au, Al, Ge, Cr, Pd, Pt)
Manufacturer:
Plassys
Model:
MEB 500SL
Typical process information

Equipement sur badgeuse BCM depuis le 7 avril 2021

Ti, Ni, Au, Ge, Al, Pd, Pt, Cr

500nm max

Non-uniformité dépôt <5% 6 pouces

Non-uniformité gravure <5% 4 pouces

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.