Picture of Navigator8
Current status:
AVAILABLE
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CMNF Team
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Asher tool.

Gases: O2 (500 sccm), CF4 (10 sccm), N2 (50 sccm)

Power: 13.56 MHz, 1000 W

Pressure: 50 - 1000 mTorr

Chamber heating: 20 - 250 °C

Chuck heating: 20 - 250 °C

Tool name:
Navigator8
Manufacturer:
Plasmatherm
Model:
Navigator8

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