Picture of CVD Graphene
Current status:
AVAILABLE
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Responsibles
Group:
CMNF - Croissance et caractérisations avancées
Files
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Description
Details
Tool name:
CVD Graphene
Manufacturer:
jipelec
Model:
Jetfirst100F
Typical process information

Typical conditions on Cu : 980°C - 1050°C (10-100 sccm Ar,1-200 sccm H2, 1-20 sccm CH4, 10-20 Torr)

Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
Process line CMNF test
Tool Modes
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