Picture of Estrelas (DRIE)
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AVAILABLE
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Description

Equipement sur badgeuse BCM depuis le 02 mai 2021

Deep Si etching, SOI

Bosch process

Cryogenic process

Anti-notching apparatus

4" quartz clamp

220 mm electrode

ICP 5 kW @ 2 MHz

HF 600 W @ 13.56 MHz

LF 300 W @ 350 kHz, pulsed

 

Details
Tool name:
Estrelas (DRIE)
Manufacturer:
OIPT, UK
Model:
OXFORD Estrelas PlasmaLab Pro 100
Typical process information

Bosch process

SF6, C4F8, O2

Cryogenic process

SF6+O2

Continuous

SF6+C4F8

Additional gas: Ar

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