AutoSE spectroscopic ellipsometer
It enables measurements of optical properties of films having thickness ranging from few nanometers to few microns, between 440 to 1000 nm. It allows rapid and automatic data acquisitions (few seconds). Mapping of optical properties can be easily achieved on samples up to 100 x 100 mm², using the XYZ mtorized stage. Spot sizes down to 25 µm x 25 µm can be selected for local investigation.
The sofware is controlled by DeltaPsi2 sofware
Equipement sur badgeuse BCM depuis le 27mai 2021