Picture of CVD Graphene-RTA
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Group:
CMNF Team
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Changement de responsabilité au départ à la retraite de Dominique Vignaud.

Four de recuit 1200°C

Gaz : CH4, H2

Vide primaire

Tool name:
CVD Graphene-RTA
Manufacturer:
jipelec
Model:
Jetfirst100F

Typical conditions on Cu : 980°C - 1050°C (10-100 sccm Ar,1-200 sccm H2, 1-20 sccm CH4, 10-20 Torr)

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Process line CMNF test
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